Coupling of Length Scales and Atomistic Simulation of a MEMS Device
نویسنده
چکیده
We simulate the dynamic and temperature depen dent behavior of two di erent Micro Electro Mechanical Systems MEMS by utilizing recently developed par allel codes which enable a coupling of length scales The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale by combining the power of an atomistic simulation with the e ciency of nite elements This work studies the dynamics of a sil icon micro gear train and the vibrational behavior of a micron scale quartz oscillator The work provides a new paradigm for device design and prediction and for the relevance of atomistic simulation
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